H2SO4

Sulfuric acid 95-98% VLSI

Main Properties

M98.08
D1.84
b.p290 °C
m.p10 °C

Product Specification

Clear liquid  Complying
Color (APHA Pt-Co)  <= 10
Assay (T)  95.0-98.0%w/w
Residue after ignition  <= 0.0003%
Chloride (Cl)  <= 0.00001%
Nitrate (NO3)  <= 0.00002%
Phosphate (PO4)  <= 0.00003%
Silver (Ag)  <= 10ppb
Aluminum (Al)  <= 50ppb
Arsenic (As)  <= 10ppb
Gold (Au)  <= 10ppb
Boron (B)  <= 20ppb
Barium (Ba)  <= 10ppb
Beryllium (Be)  <= 10ppb
Bismuth (Bi)  <= 20ppb
Calcium (Ca)  <= 50ppb
Cadmium (Cd)  <= 10ppb
Cobalt (Co)  <= 10ppb
Chromium (Cr)  <= 10ppb
Copper (Cu)  <= 10ppb
Iron (Fe)  <= 50ppb
Gallium (Ga)  <= 10ppb
Germanium (Ge)  <= 10ppb
Potassium (K)  <= 50ppb
Lithium (Li)  <= 10ppb
Magnesium (Mg)  <= 20ppb
Manganese (Mn)  <= 10ppb
Sodium (Na)  <= 50ppb
Niobium (Nb)  <= 20ppb
Nickel (Ni)  <= 10ppb
Lead (Pb)  <= 10ppb
Antimony (Sb)  <= 10ppb
Silicon (Si)  <= 30ppb
Tin (Sn)  <= 20ppb
Strontium (Sr)  <= 20ppb
Tantalum (Ta)  <= 20ppb
Titanium (Ti)  <= 20ppb
Thallium (Tl)  <= 20ppb
Vanadium (V)  <= 10ppb
Zinc (Zn)  <= 20ppb
Zirconium (Zr)  <= 10ppb
Particle count > 0.5µm  <= 80P/ml
Particle count > 1.0µm  <= 10P/ml

Cat. n° 195576

Formula : H2SO4
CAS : 7664-93-9
EC : 231-639-5
UN : 1830
<h5>H<sub>2</sub>SO<sub>4</sub></h5>

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